Tag Archives: UV1250-UV1280

KLA Tencor Prometrix UV1280 UV1050 Aligner Initialization

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The following video shows the timing of the flat aligner movement an wafer want initialization during a power on sequence.

Depending on your error and timing of the fault, this video can help us determine what part may be faulty before sending it in for repair.

– from UV1250-UV1280 – PCB Stage Driver F2 Rev. F – 36-0287 54-0287 RevAG ,36-0294 – Turret Servo Driver 54-0294 – Servo Driver , 51-0175 H-2 Aligner – Motor Controller ,54-0384 PC interface card to talk to measurement board – PCIF ,PCB Measurement Control Board 54-0317 36-0317 , 54-0317REV2,PCB-8809A-B4 Com/Processor board from front card cage. – Ziatech Processor Board

If you have any questions or want to post videos or troubleshooting tips for this tool, contact us at info@comvolt.com. If you are looking for parts, https://www.getspares.com is a great place to start!

Another Sample of Failed Semiconductor Fab Electonics and Happy Endings

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GetSparesCESP-002
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Repaired/shipped
GetSparesTESP-002A2
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
05/02/2019Custom solution/shipped
GetSparesPCS4900/DELL
Therma-Wave
Single board computer
Opti-probe 2600-2690 3260-3290
Thermawave/KLA
Inspection
05/02/2019Repaired/shipped
GetSparesCESB-1011
DNS
Spin control board. Station Controller DNS
80A
DNS
Photolithograpy
04/17/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Repaired/shipped
GetSpares90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
04/12/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Repaired/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/11/2019Custom solution/shipped
GetSparesEESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
04/01/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Repaired/shipped
GetSparesCESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
03/28/2019Custom solution/shipped
GetSpares36-0201 54-0219
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
12/14/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Custom solution/shipped
GetSpares36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSpares36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018Repaired/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
10/05/2018Repaired/shipped
GetSparesEST0220C05WNXE1
SMC
Smart Terminal
INR-497-001B
SMC
Water Chiller
09/10/2018Repaired/shipped
GetSparesPS500 2-39-55593
DNS
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018Repaired/shipped
GetSparesEEBH-0011X1
DNS
heater control bake unit
80B
DNS
Photolithograpy
06/28/2018Repaired/shipped
GetSpares780-14091-000
KLA
CD Sem Column Aligner
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
06/05/2018Custom solution/shipped
GetSparesVLT 2800
DanFoss
drive water pump in chillers
ASML chiller
Neslab
Chiller
05/23/2018Custom solution/shipped
GetSpares36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/04/2016Repaired/shipped

More Custom Solutions for OMRON, ASML and Danfoss and many other Semiconductor Equipment Manufacturers

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GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/06/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 07/13/2018 Repaired/shipped
GetSpares 36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 08/01/2018 Custom solution/shipped
GetSpares 36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F 		UV1250-UV1280
Tencor/KLA
Inspection		 08/01/2018 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/01/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/24/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/19/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 07/13/2018 Repaired/shipped
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 07/02/2018 Repaired/shipped
GetSpares BU504XII 2-XZ-10840
OMRON
Battery backed power supply		 80B
DNS
Photolithograpy		 07/15/2018 Repaired/shipped
GetSpares PS500 2-39-55593
DNS
Battery backed power supply		 80B
DNS
Photolithograpy		 07/15/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/21/2018 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 07/11/2018 Repaired/shipped
GetSpares EEBH-0011X1
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 06/28/2018 Repaired/shipped
GetSpares EEBH-0011
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 06/19/2018 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit		 80B
DNS
Photolithograpy		 09/06/2017 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply 		RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0042 54-0057 54-0252
Prometrix
Analog I/O Power Supply 		RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 07/04/2018 Repaired/shipped
GetSpares EEYC-001
DNS
Cage for all the slave cards in front of track		 80B
DNS
Photolithograpy		 07/02/2018 Custom solution/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 07/02/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/13/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/04/2018 Repaired/shipped
GetSpares 90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC		 L3510
Novellus/Gasonics
RIE/Plasma		 06/21/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 06/19/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389) REV P
Prometrix
Current Source PCB. Green style with Beckman 7581C		 RS55
Prometrix/KLA
Wafer Resistivity		 06/04/2018 Repaired/shipped
GetSpares 36-0325
Prometrix
controller that slides in from right horizontally.		 RS75
Prometrix/KLA
Wafer Resistivity		 05/04/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 06/06/2018 Repaired/shipped
GetSpares 95-3155
Gasonics
Cluster Misc Controller With AC power detect J6		 PEP3510
Novellus/Gasonics
RIE/Plasma		 07/28/2016 Repaired/shipped
GetSpares 567-5101 HV Supply
Hitachi
Hv supply for electron gun		 Unknown CD SEM
Hitachi
SEM		 05/22/2018 For Sale/ Stock
GetSpares LSMUT_TF
Comvolt
Just an HV timer. 		SMBUS_ASMU1
Comvolt
lab tester		 05/15/2018 Custom solution/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 06/01/2018 Repaired/shipped
GetSpares 001-4130-03
Brooks
Brooks ACE VCE Controller		 LAM and others
Brooks
Robots		 05/23/2018 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/23/2018 For Sale/ Stock
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/23/2018 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares VLT 2800
DanFoss
drive water pump in chillers		 ASML chiller
Neslab
Chiller		 05/21/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 05/15/2018 Repaired/shipped
GetSpares 810-025368-001
Lam Research
Simple relay board. located in top left of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/21/2015 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/27/2018 For Sale/ Stock
GetSpares D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver 		SK200
DNS
Photolithograpy		 03/27/2018 Repaired/shipped
GetSpares CESB-2012
DNS
Spin Board		 80A
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 04/14/2018 Repaired/shipped
GetSpares EEJA-001A
DNS
6-axis controller based on the note on this unit.		 80B
DNS
Photolithograpy		 04/06/2018 Repaired/shipped
GetSpares EESA-001 AU3575N223
DNS
servo amp		 80B
DNS
Photolithograpy		 10/25/2017 For Sale/ Stock
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001		 SK200
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares D2443B10A D2447
DNS
5 phase motor driver that goes into
D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001		 SK200
DNS
Photolithograpy		 04/14/2018 Repaired/shipped
GetSpares 95-0541Misc Controller
Gasonics

 PEP3510
Novellus/Gasonics
RIE/Plasma		 10/27/2016 Repaired/shipped
GetSpares 1-139-023
IDI
Communications Card		 M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-139-022
IDI
Pump Controller		 M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Repaired/shipped
GetSpares 1-130-020
IDI
mother board 		M300
IDI/Cybor
Pump		 02/18/2014 Custom solution/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares 810-025369-002
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/10/2018 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 04/10/2018 Repaired/shipped
GetSpares 375039
Tencor
Data Processing Board		 AIT2
KLA
Inspection		 04/05/2018 Custom solution/shipped
GetSpares 810-025369-001
Lam Research
Resistivity Board. located in top center of the chiller		 Lam-TCU_2080
Lam
Chiller		 04/03/2018 Repaired/shipped
GetSpares 810-025370—1
Lam Research
Large rectangular board that controls and displays status leds		 Lam-TCU_2080
Lam
Chiller		 04/03/2018 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 04/03/2018 Repaired/shipped
GetSpares Super Vexta UDX5107
Vexta
5 axis driver		 80A
DNS
Photolithograpy		 03/29/2018 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 03/22/2018 Repaired/shipped
GetSpares 3510N45E10
Tamagawa
Tamagawa Motor AC servo		 80B
DNS
Photolithograpy		 03/19/2018 Repaired/shipped
GetSpares 373583
Tencor
ANALOG BOARD		 AIT2
KLA
Inspection		 06/22/2016 Repaired/shipped
GetSpares SQV175-1433-2
Prometrix
Power Supply		 6220
KLA
Inspection		 02/28/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB 		RS55
Prometrix/KLA
Wafer Resistivity		 01/29/2018 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB 		RS55
Prometrix/KLA
Wafer Resistivity		 01/29/2018 Repaired/shipped
GetSpares 0100-02016 0100-20066
AMAT
Analog Sync Detect AMAT		 P5000
Applied Materials AMAT
RIE/Plasma		 01/04/2018 For Sale/ Stock
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 02/20/2018 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 02/15/2018 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 02/15/2018 Repaired/shipped

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

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More successful solutions from GetSpares

 

GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 11/08/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 11/06/2017 Repaired/shipped

DNS_Hamamatsu_L6001-01
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 10/23/2017 Repaired/shipped
GetSpares T0351/10-1006
Tectrol
Power Supply		 6200
KLA
Inspection		 07/19/2017 For Sale/ Stock
GetSpares GLC352-CEF
Emerson
Power Supply		 Not Specified
Not Specified
Not Specified		 10/30/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 10/06/2017 Repaired/shipped
GetSpares EESA-001 AU3575N233 2-39-48133
DNS
servo amp		 80B
DNS
Photolithograpy		 10/25/2017 Repaired/shipped
GetSpares AU6351N60 2-39-57597
DNS
servo amp		 80B Scrubber
DNS
Photolithograpy		 10/22/2017 For Sale/ Stock
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/23/2017 Repaired/shipped
GetSpares EEUE-001
DNS
EEW Control Unit		 80A
DNS
Photolithograpy		 10/03/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 09/20/2017 For Sale/ Stock
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 10/12/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 10/06/2017 Repaired/shipped
GetSpares INR-497-P2393 A19393-01
SMC
2 channel controller board		 INR-497-001B
SMC
Water Chiller		 10/11/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 11/10/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 10/07/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 10/05/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 10/04/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 09/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/11/2016 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK		 80A
DNS
Photolithograpy		 09/26/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 09/22/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit		 80B
DNS
Photolithograpy		 09/06/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 10/21/2015 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 09/08/2017 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 08/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 09/18/2014 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4		 80B
DNS
Photolithograpy		 08/09/2017 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4		 80B
DNS
Photolithograpy		 08/09/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 07/21/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/31/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/22/2016 Repaired/shipped
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 07/17/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 07/17/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box		 RS75
Prometrix/KLA
Wafer Resistivity		 01/19/2015 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 07/06/2017 Repaired/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 07/06/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/11/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 07/11/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 06/27/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp		 80B
DNS
Photolithograpy		 06/23/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/23/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/23/2017 Repaired/shipped
GetSpares CESP-0002 2-VC-42102
DNS
maintenance panel with SCN5		 80B
DNS
Photolithograpy		 02/03/2017 Custom solution/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW		 80B
DNS
Photolithograpy		 04/02/2017 Repaired/shipped
GetSpares CESB-2011 2-VC-19075
DNS
Spin control board. Station Controller		 60A
DNS
Photolithograpy		 06/06/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 06/12/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor		 AIT2
KLA
Inspection		 06/22/2016 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 06/12/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 06/12/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface		 L3510
Novellus/Gasonics
RIE/Plasma		 06/06/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 06/06/2017 For Sale/ Stock
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 04/28/2017 Repaired/shipped
GetSpares 54-0311
Prometrix
UV1250/ 1050 optical array PDA		 UV1050
Tencor/KLA
Inspection		 01/03/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 06/06/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 05/30/2017 Repaired/shipped
GetSpares CESP-001A F-VC-40833
DNS
maintenance panel without SCN5		 80B
DNS
Photolithograpy		 04/11/2017 For Sale/ Stock
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit		 80B
DNS
Photolithograpy		 05/24/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 54-0317 36-0317
KLA
PCB Measurement Control Board 54-0317 36-0317		 UV1250-UV1280
Tencor/KLA
Inspection		 03/29/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 05/04/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/15/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/15/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 05/08/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 05/09/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange		 RS55
Prometrix/KLA
Wafer Resistivity		 02/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 04/19/2017 Repaired/shipped
GetSpares 710-693221-000
KLA
Matrox Corona Rev 6 8M Confg AIT2, Slot		 8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM		 04/17/2017 Repaired/shipped
GetSpares 356166 Matrox Corona
KLA
U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18		 AIT2
KLA
Inspection		 04/17/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 04/24/2017 Repaired/shipped
GetSpares CEMP-0016 EEMP-0021X3
DNS
Main Display Panel		 80A
DNS
Photolithograpy		 04/18/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB		 RS35
Prometrix/KLA
Wafer Resistivity		 04/19/2017 Custom solution/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA		 L3510
Novellus/Gasonics
RIE/Plasma		 04/03/2017 Repaired/shipped
GetSpares 55079-763288
Prometrix
PCA-DUAL Stepper Driver		 RS55
Prometrix/KLA
Wafer Resistivity		 03/29/2017 Repaired/shipped
GetSpares 36-0201
Prometrix
H2 Interface PCB for UV1050/UV1250		 UV1050
Tencor/KLA
Inspection		 03/29/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F		 UV1250-UV1280
Tencor/KLA
Inspection		 03/29/2017 Repaired/shipped
GetSpares 2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair		 80B
DNS
Photolithograpy		 04/03/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 03/13/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 04/04/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW		 SK200
DNS
Photolithograpy		 04/02/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 03/10/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR		 80B
DNS
Photolithograpy		 03/13/2017 Custom solution/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined		 Not Specified
Not Specified
Not Specified		 03/07/2017 Repaired/shipped
GetSpares CERB-1016 2-VC-15254-1
DNS
Transport Station Controller		 60A
DNS
Photolithograpy		 02/04/2017 Repaired/shipped
GetSpares 2114B-30SLQST
Cyonics
CYONICS-UNIPHASE		 6220
KLA
Inspection		 01/09/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD		 SK200
DNS
Photolithograpy		 02/24/2017 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board		 80A
DNS
Photolithograpy		 02/04/2017 Repaired/shipped