Origin Return for Dainippon Screen DNS 80B Coat Develop Track


Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.


How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

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GetSpares Undefined
Undefined
undefined
Not Specified
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GetSpares Undefined
Undefined
undefined
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GetSpares Undefined
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undefined
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Not Specified
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02/20/2018 Repaired/shipped
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DNS
servo amp
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DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
10/04/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
09/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/11/2016 Repaired/shipped
GetSpares CESA-804
DNS
Driver Motor Box Servo PK
80A
DNS
Photolithograpy
09/26/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
09/22/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/06/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
10/21/2015 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/08/2017 For Sale/ Stock
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/21/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
08/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
09/18/2014 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 2-39-45431
DNS
FRD-4
80B
DNS
Photolithograpy
08/09/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
07/21/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/31/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/22/2016 Repaired/shipped
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
07/17/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/17/2017 Repaired/shipped
GetSpares 52-0616
Prometrix
ME Box
RS75
Prometrix/KLA
Wafer Resistivity
01/19/2015 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
07/06/2017 Repaired/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
07/06/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
07/11/2017 Repaired/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
06/27/2017 Repaired/shipped
GetSpares EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Custom solution/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/23/2017 Repaired/shipped
GetSpares CESP-0002 2-VC-42102
DNS
maintenance panel with SCN5
80B
DNS
Photolithograpy
02/03/2017 Custom solution/shipped
GetSpares L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
04/02/2017 Repaired/shipped
GetSpares CESB-2011 2-VC-19075
DNS
Spin control board. Station Controller
60A
DNS
Photolithograpy
06/06/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
06/12/2017 Repaired/shipped
GetSpares CMX15 90X0054
KLA
LCD Monitor
AIT2
KLA
Inspection
06/22/2016 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
06/12/2017 Repaired/shipped
GetSpares 90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
06/06/2017 For Sale/ Stock
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
04/28/2017 Repaired/shipped
GetSpares 54-0311
Prometrix
UV1250/ 1050 optical array PDA
UV1050
Tencor/KLA
Inspection
01/03/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
06/06/2017 Repaired/shipped
GetSpares 15451-010
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
05/30/2017 Repaired/shipped
GetSpares CESP-001A F-VC-40833
DNS
maintenance panel without SCN5
80B
DNS
Photolithograpy
04/11/2017 For Sale/ Stock
GetSpares 2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
05/24/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 54-0317 36-0317
KLA
PCB Measurement Control Board 54-0317 36-0317
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
05/04/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/15/2017 Repaired/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
05/08/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
05/09/2017 Repaired/shipped
GetSpares 36-0004 (Alternate 54-0005 or 54-0389)
Prometrix
Current Source PCB
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 36-0005 54-0006
Prometrix
PCA ART Relay Board W/Exchange
RS55
Prometrix/KLA
Wafer Resistivity
02/22/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
04/19/2017 Repaired/shipped
GetSpares 710-693221-000
KLA
Matrox Corona Rev 6 8M Confg AIT2, Slot
8100 8100XP 8100XPR 8250 8300 8450
KLA
SEM
04/17/2017 Repaired/shipped
GetSpares 356166 Matrox Corona
KLA
U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18
AIT2
KLA
Inspection
04/17/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/24/2017 Repaired/shipped
GetSpares CEMP-0016 EEMP-0021X3
DNS
Main Display Panel
80A
DNS
Photolithograpy
04/18/2017 Repaired/shipped
GetSpares 54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
04/19/2017 Custom solution/shipped
GetSpares 903-1598
Gasonics
PCB-EOP/Pressure ControlIPC SPA
L3510
Novellus/Gasonics
RIE/Plasma
04/03/2017 Repaired/shipped
GetSpares 55079-763288
Prometrix
PCA-DUAL Stepper Driver
RS55
Prometrix/KLA
Wafer Resistivity
03/29/2017 Repaired/shipped
GetSpares 36-0201
Prometrix
H2 Interface PCB for UV1050/UV1250
UV1050
Tencor/KLA
Inspection
03/29/2017 Custom solution/shipped
GetSpares 36-0287
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
03/29/2017 Repaired/shipped
GetSpares 2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
04/03/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
04/04/2017 Repaired/shipped
GetSpares L6599-01
Hamamatsu
L6599-01 Lamp House for EEW
SK200
DNS
Photolithograpy
04/02/2017 Custom solution/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/10/2017 Repaired/shipped
GetSpares INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
03/13/2017 Custom solution/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
03/07/2017 Repaired/shipped
GetSpares CERB-1016 2-VC-15254-1
DNS
Transport Station Controller
60A
DNS
Photolithograpy
02/04/2017 Repaired/shipped
GetSpares 2114B-30SLQST
Cyonics
CYONICS-UNIPHASE
6220
KLA
Inspection
01/09/2017 Repaired/shipped
GetSpares 2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
02/24/2017 Repaired/shipped
GetSpares CEDB-1013 2-VC-15252
DNS
Indexer Board
80A
DNS
Photolithograpy
02/04/2017 Repaired/shipped