Before and after repair we process wafers with a variety of recipies like this one. This is a reference point for a working tool used for communicing symptoms and troubleshooting problems.
This process is used to test electronic control boards in L3510 etcher/asher.
PCB’s that apply but not limited to are:
15451-010, PCB-EOP/Pressure Control IPC SPA
Branson/IPC,
16495-01-REV.7.4 , I/O interface ,16495-01E
16498-01, Display Driver,
16495-01B, 16495-01
90-2590, 89-2572,
| GetSpares | CESP-002 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Repaired/shipped | |
| GetSpares | TESP-002A2 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 05/02/2019 | Custom solution/shipped | |
| GetSpares | PCS4900/DELL Therma-Wave Single board computer | Opti-probe 2600-2690 3260-3290 Thermawave/KLA Inspection | 05/02/2019 | Repaired/shipped | |
| GetSpares | CESB-1011 DNS Spin control board. Station Controller DNS | 80A DNS Photolithograpy | 04/17/2019 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface | L3510 Novellus/Gasonics RIE/Plasma | 04/12/2019 | Custom solution/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/11/2019 | Custom solution/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp | 80B DNS Photolithograpy | 04/01/2019 | Repaired/shipped | |
| GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Repaired/shipped | |
| GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 | 80B DNS Photolithograpy | 03/28/2019 | Custom solution/shipped | |
| GetSpares | 36-0201 54-0219 Prometrix H2 Interface PCB for UV1050/UV1250 | UV1050 Tencor/KLA Inspection | 12/14/2018 | Repaired/shipped | |
| GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Custom solution/shipped | |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | 36-0294 Prometrix Turret Servo Driver 54-0294 | UV1250-UV1280 Tencor/KLA Inspection | 12/12/2018 | Repaired/shipped | |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 10/05/2018 | Repaired/shipped | |
| GetSpares | EST0220C05WNXE1 SMC Smart Terminal | INR-497-001B SMC Water Chiller | 09/10/2018 | Repaired/shipped | |
| GetSpares | PS500 2-39-55593 DNS Battery backed power supply | 80B DNS Photolithograpy | 07/15/2018 | Repaired/shipped | |
| GetSpares | EEBH-0011X1 DNS heater control bake unit | 80B DNS Photolithograpy | 06/28/2018 | Repaired/shipped | |
| GetSpares | 780-14091-000 KLA CD Sem Column Aligner | 8100 8100XP 8100XPR 8250 8300 8450 KLA SEM | 06/05/2018 | Custom solution/shipped | |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers | ASML chiller Neslab Chiller | 05/23/2018 | Custom solution/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB | RS55 Prometrix/KLA Wafer Resistivity | 02/04/2016 | Repaired/shipped |
GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
01/04/2019
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Custom solution/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
For Sale/ Stock
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/21/2018
Repaired/shipped
GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
12/04/2018
Repaired/shipped
GetSpares
Undefined
Undefined
undefined
Not Specified
Not Specified
Not Specified
01/09/2019
Repaired/shipped
GetSpares
2-39-51930 2-39-61074 UT3-F1AE /DSS1-A
DNS
LCD Gold Version
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped
GetSpares
2-39-51930 2-39-61074 UT3-F1AE
DNS
LCD
SK200
DNS
Photolithograpy
12/21/2018
Custom solution/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0294
Prometrix
Turret Servo Driver 54-0294
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
12/12/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Custom solution/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
INR-244-402 2-39-45751
DNS
Thermo Controller INR
80B
DNS
Photolithograpy
11/27/2018
Repaired/shipped
GetSpares
AG09
Hamamatsu
50V power supply for HgXe light.
80B
DNS
Photolithograpy
11/13/2018
Repaired/shipped
GetSpares
54-0014 36-0014
Prometrix
PCA-DVM, ART Voltmeter PCB
RS35
Prometrix/KLA
Wafer Resistivity
12/14/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
12/04/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N233 2-39-48133
DNS
servo amp
80B
DNS
Photolithograpy
12/08/2018
Repaired/shipped
GetSpares
16498-01
Gasonics
Display Driver
L3510
Novellus/Gasonics
RIE/Plasma
11/27/2018
Repaired/shipped
GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/28/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/18/2018
For Sale/ Stock
GetSpares
2-VC-16217-1EEBH-0021
DNS
heater control bake unit
80B
DNS
Photolithograpy
11/02/2018
Repaired/shipped
GetSpares
L6001-01
Hamamatsu
L6001-01 Lamp House for EEW
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
11/13/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped
GetSpares
EESA-001 AU3575N223
DNS
servo amp
80B
DNS
Photolithograpy
10/16/2018
Repaired/shipped
GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
10/04/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
10/15/2018
Repaired/shipped
GetSpares
90-2590 16495-01B 16495-01
Gasonics
Branson/IPC, I/O interface
L3510
Novellus/Gasonics
RIE/Plasma
10/12/2018
Repaired/shipped
GetSpares
2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07
DNS
Controller 8axis Controller ID-A Transport Unit
80B
DNS
Photolithograpy
09/20/2018
Repaired/shipped
GetSpares
EEYC-0011 2-VC-20626
DNS
20 slot – Cage for all the slave cards in front of track
80B
DNS
Photolithograpy
08/15/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAB
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
09/24/2018
Custom solution/shipped
GetSpares
2-VC-19090 EERC-0012
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/13/2018
Repaired/shipped
GetSpares
EESC-0012 2-VC-19115 Spin Slave
DNS
Transport Slave Board Repair
80B
DNS
Photolithograpy
09/12/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
09/05/2018
Repaired/shipped
GetSpares
D2480-1 2-VC-28124 GEIA-001
DNS
6-axis Motor Driver
SK200
DNS
Photolithograpy
05/15/2018
Repaired/shipped
GetSpares
BU504XII 2-XZ-10840
OMRON
Battery backed power supply
80B
DNS
Photolithograpy
07/15/2018
Repaired/shipped
GetSpares
001-4130-03
Brooks
Brooks ACE VCE Controller
LAM and others
Brooks
Robots
05/23/2018
Repaired/shipped
GetSpares
36-0287 54-0287 RevAG
Prometrix
PCB Stage Driver F2 Rev. F
UV1250-UV1280
Tencor/KLA
Inspection
08/17/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped
GetSpares
EESA-001A1 AU6356N20 EESA-001 2-39-53462
DNS
servo amp
80B
DNS
Photolithograpy
08/21/2018
Repaired/shipped
GetSpares
90-2590 89-2572
Gasonics
Branson/IPC, I/O interface with squre ADC
L3510
Novellus/Gasonics
RIE/Plasma
08/09/2018
Repaired/shipped
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/06/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
| GetSpares | 36-0287 54-0287 RevAB Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | Custom solution/shipped |
| GetSpares | 36-0287 54-0287 RevAG Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
08/01/2018 | For Sale/ Stock |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/01/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/24/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/19/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
07/13/2018 | Repaired/shipped |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
| GetSpares | BU504XII 2-XZ-10840 OMRON Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
| GetSpares | PS500 2-39-55593 DNS Battery backed power supply |
80B DNS Photolithograpy |
07/15/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
| GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
07/11/2018 | Repaired/shipped |
| GetSpares | EEBH-0011X1 DNS heater control bake unit |
80B DNS Photolithograpy |
06/28/2018 | Repaired/shipped |
| GetSpares | EEBH-0011 DNS heater control bake unit |
80B DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
| GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
07/04/2018 | Repaired/shipped |
| GetSpares | EEYC-001 DNS Cage for all the slave cards in front of track |
80B DNS Photolithograpy |
07/02/2018 | Custom solution/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
07/02/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/13/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/04/2018 | Repaired/shipped |
| GetSpares | 90-2590 89-2572 Gasonics Branson/IPC, I/O interface with squre ADC |
L3510 Novellus/Gasonics RIE/Plasma |
06/21/2018 | Repaired/shipped |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
06/19/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) REV P Prometrix Current Source PCB. Green style with Beckman 7581C |
RS55 Prometrix/KLA Wafer Resistivity |
06/04/2018 | Repaired/shipped |
| GetSpares | 36-0325 Prometrix controller that slides in from right horizontally. |
RS75 Prometrix/KLA Wafer Resistivity |
05/04/2018 | Repaired/shipped |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
06/06/2018 | Repaired/shipped |
| GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
07/28/2016 | Repaired/shipped |
| GetSpares | 567-5101 HV Supply Hitachi Hv supply for electron gun |
Unknown CD SEM Hitachi SEM |
05/22/2018 | For Sale/ Stock |
| GetSpares | LSMUT_TF Comvolt Just an HV timer. |
SMBUS_ASMU1 Comvolt lab tester |
05/15/2018 | Custom solution/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
06/01/2018 | Repaired/shipped |
| GetSpares | 001-4130-03 Brooks Brooks ACE VCE Controller |
LAM and others Brooks Robots |
05/23/2018 | Repaired/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | For Sale/ Stock |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/23/2018 | Repaired/shipped |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped |
| GetSpares | VLT 2800 DanFoss drive water pump in chillers |
ASML chiller Neslab Chiller |
05/21/2018 | For Sale/ Stock |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
05/15/2018 | Repaired/shipped |
| GetSpares | 810-025368-001 Lam Research Simple relay board. located in top left of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | For Sale/ Stock |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/27/2018 | For Sale/ Stock |
| GetSpares | D2480-1 2-VC-28124 GEIA-001 DNS 6-axis Motor Driver |
SK200 DNS Photolithograpy |
03/27/2018 | Repaired/shipped |
| GetSpares | CESB-2012 DNS Spin Board |
80A DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
04/14/2018 | Repaired/shipped |
| GetSpares | EEJA-001A DNS 6-axis controller based on the note on this unit. |
80B DNS Photolithograpy |
04/06/2018 | Repaired/shipped |
| GetSpares | EESA-001 AU3575N223 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | For Sale/ Stock |
| GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | D2443B10A D2447 DNS 5 phase motor driver that goes into D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 |
SK200 DNS Photolithograpy |
04/14/2018 | Repaired/shipped |
| GetSpares | 95-0541Misc Controller Gasonics |
PEP3510 Novellus/Gasonics RIE/Plasma |
10/27/2016 | Repaired/shipped |
| GetSpares | 1-139-023 IDI Communications Card |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-139-022 IDI Pump Controller |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Repaired/shipped |
| GetSpares | 1-130-020 IDI mother board |
M300 IDI/Cybor Pump |
02/18/2014 | Custom solution/shipped |
| GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | 810-025369-002 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/10/2018 | Repaired/shipped |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/10/2018 | Repaired/shipped |
| GetSpares | 375039 Tencor Data Processing Board |
AIT2 KLA Inspection |
04/05/2018 | Custom solution/shipped |
| GetSpares | 810-025369-001 Lam Research Resistivity Board. located in top center of the chiller |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
| GetSpares | 810-025370—1 Lam Research Large rectangular board that controls and displays status leds |
Lam-TCU_2080 Lam Chiller |
04/03/2018 | Repaired/shipped |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
04/03/2018 | Repaired/shipped |
| GetSpares | Super Vexta UDX5107 Vexta 5 axis driver |
80A DNS Photolithograpy |
03/29/2018 | Repaired/shipped |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
03/22/2018 | Repaired/shipped |
| GetSpares | 3510N45E10 Tamagawa Tamagawa Motor AC servo |
80B DNS Photolithograpy |
03/19/2018 | Repaired/shipped |
| GetSpares | 373583 Tencor ANALOG BOARD |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped |
| GetSpares | SQV175-1433-2 Prometrix Power Supply |
6220 KLA Inspection |
02/28/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/29/2018 | Repaired/shipped |
| GetSpares | 0100-02016 0100-20066 AMAT Analog Sync Detect AMAT |
P5000 Applied Materials AMAT RIE/Plasma |
01/04/2018 | For Sale/ Stock |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
02/20/2018 | Repaired/shipped |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
02/15/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
02/15/2018 | Repaired/shipped |
This is a story of two Cluster Misc Controller from a Novellus / Gasonics PEP 3510. There are other Cluster-Misc boxes, but the ones we see frequently from
are the 95-3155 and the 95-0538. They are identical and work exactly the same…WRONG!! Check your PEP-3510 to make sure which one you have. The 95-3155 has a J6 connector called AC Power/PWR Detect. The 95-0538 does not. These two boxes are almost identical except if used in place of each other, there can be status errors reported in the tool and it can cause wafers to halt or not run at all.
Check J6 connector on your Cluster Misc Controller
Common error codes due to failure for these boxes are:
“Door won’t close in a reasonable amount of time”
“CC-0520 Cluster Misc-Invalid status data in Left Cooler”
“CC-0810 Cluster Misc-Invalid status data in Right Cassette”
“CC-0710 Cluster Misc-Invalid status data in Left Cassette”
“CC-0620 Cluster Misc-Invalid status data in Right Cooler”
“CC-0616 Cluster Misc-Service error in Right Cooler”
As always, if you think your PEP 3510 or any other Semiconductor tool needs parts, contact
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | MR-J10A-S07 | 80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | 95-3155 Gasonics Cluster Misc Controller With AC power detect J6 |
PEP3510 Novellus/Gasonics RIE/Plasma |
08/04/2016 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/04/2018 | Repaired/shipped | |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
02/01/2018 | Repaired/shipped | |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
01/04/2018 | For Sale/ Stock | |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/04/2016 | Repaired/shipped | |
| GetSpares | 000496 Neslab/JR Banks Measures temperature and detects water flow from reed valve. |
Neslab model Neslab Chiller |
01/16/2018 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/12/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | GEIC-002 BP-0015C DNS Interface card in back of unit for interface unit |
SK200 DNS Photolithograpy |
01/16/2018 | For Sale/ Stock | |
| GetSpares | EEDC-0011 2-VC-19089 DNS Indexer card for 80B |
80B DNS Photolithograpy |
01/16/2018 | Repaired/shipped | |
| GetSpares | EEDC-0011 2-VC-19089 DNS Indexer card for 80B |
80B DNS Photolithograpy |
01/16/2018 | Repaired/shipped | |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
05/09/2016 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
01/04/2018 | Repaired/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
01/04/2018 | Repaired/shipped | |
| GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
12/17/2017 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/17/2017 | Repaired/shipped | |
| GetSpares | 36-0042 54-0057 54-0252 Prometrix Analog I/O Power Supply |
RS55 Prometrix/KLA Wafer Resistivity |
12/17/2017 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/12/2017 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
12/18/2017 | Repaired/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
12/13/2017 | Repaired/shipped | |
| GetSpares | 54-0317 REVA 36-0317 KLA PCB Measurement Control Board 54-0317 REVA. 36-0317. This has the J14IPDA connector and has the U11 and U16 PALS |
UV1250-UV1280 Tencor/KLA Inspection |
11/28/2017 | Repaired/shipped | |
| GetSpares | INR-497-P2393 A19393-01 SMC 2 channel controller board |
INR-497-001B SMC Water Chiller |
10/11/2017 | Repaired/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
11/22/2017 | Repaired/shipped | |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
09/26/2017 | Repaired/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
11/22/2017 | Repaired/shipped | |
| GetSpares | T0351/10-1006 Tectrol Power Supply |
6200 KLA Inspection |
07/19/2017 | Repaired/shipped | |
| GetSpares | AU6351N60 2-39-57597 DNS servo amp |
80B Scrubber DNS Photolithograpy |
10/22/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/11/2016 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Custom solution/shipped |
More successful solutions from GetSpares
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
11/08/2017 | Repaired/shipped |  |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
11/06/2017 | Repaired/shipped |
 DNS_Hamamatsu_L6001-01 |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
10/23/2017 | Repaired/shipped | |
| GetSpares | T0351/10-1006 Tectrol Power Supply |
6200 KLA Inspection |
07/19/2017 | For Sale/ Stock | |
| GetSpares | GLC352-CEF Emerson Power Supply |
Not Specified Not Specified Not Specified |
10/30/2017 | Repaired/shipped | |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
10/06/2017 | Repaired/shipped | |
| GetSpares | EESA-001 AU3575N233 2-39-48133 DNS servo amp |
80B DNS Photolithograpy |
10/25/2017 | Repaired/shipped | |
| GetSpares | AU6351N60 2-39-57597 DNS servo amp |
80B Scrubber DNS Photolithograpy |
10/22/2017 | For Sale/ Stock | |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/23/2017 | Repaired/shipped | |
| GetSpares | EEUE-001 DNS EEW Control Unit |
80A DNS Photolithograpy |
10/03/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
09/20/2017 | For Sale/ Stock | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
10/12/2017 | Repaired/shipped | |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
10/06/2017 | Repaired/shipped | |
| GetSpares | INR-497-P2393 A19393-01 SMC 2 channel controller board |
INR-497-001B SMC Water Chiller |
10/11/2017 | Custom solution/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
11/10/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
10/07/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
10/05/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
10/04/2017 | Repaired/shipped | |
| GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
09/22/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/11/2016 | Repaired/shipped | |
| GetSpares | CESA-804 DNS Driver Motor Box Servo PK |
80A DNS Photolithograpy |
09/26/2017 | Repaired/shipped | |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
09/22/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07 DNS Controller 8axis Controller ID-A Transport Unit |
80B DNS Photolithograpy |
09/06/2017 | Repaired/shipped | |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
10/21/2015 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
09/08/2017 | For Sale/ Stock | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/21/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
08/24/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
09/18/2014 | Repaired/shipped | |
| GetSpares | 2-39-45431 DNS FRD-4 |
80B DNS Photolithograpy |
08/09/2017 | Repaired/shipped | |
| GetSpares | 2-39-45431 DNS FRD-4 |
80B DNS Photolithograpy |
08/09/2017 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
07/21/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/31/2017 | Custom solution/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/22/2016 | Repaired/shipped | |
| GetSpares | 2-VC-16217-1EEBH-0021 DNS heater control bake unit |
80B DNS Photolithograpy |
07/17/2017 | Repaired/shipped | |
| GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
07/17/2017 | Repaired/shipped | |
| GetSpares | 52-0616 Prometrix ME Box |
RS75 Prometrix/KLA Wafer Resistivity |
01/19/2015 | Repaired/shipped | |
| GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
07/06/2017 | Repaired/shipped | |
| GetSpares | 903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
07/06/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/11/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
07/11/2017 | Repaired/shipped | |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
06/27/2017 | Repaired/shipped | |
| GetSpares | EESA-001A1 AU6356N20 EESA-001 2-39-53462 DNS servo amp |
80B DNS Photolithograpy |
06/23/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/23/2017 | Custom solution/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/23/2017 | Repaired/shipped | |
| GetSpares | CESP-0002 2-VC-42102 DNS maintenance panel with SCN5 |
80B DNS Photolithograpy |
02/03/2017 | Custom solution/shipped | |
| GetSpares | L6001-01 Hamamatsu L6001-01 Lamp House for EEW |
80B DNS Photolithograpy |
04/02/2017 | Repaired/shipped | |
| GetSpares | CESB-2011 2-VC-19075 DNS Spin control board. Station Controller |
60A DNS Photolithograpy |
06/06/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
06/12/2017 | Repaired/shipped | |
| GetSpares | CMX15 90X0054 KLA LCD Monitor |
AIT2 KLA Inspection |
06/22/2016 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
06/12/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
06/12/2017 | Repaired/shipped | |
| GetSpares | 90-2590 16495-01B 16495-01 Gasonics Branson/IPC, I/O interface |
L3510 Novellus/Gasonics RIE/Plasma |
06/06/2017 | Repaired/shipped | |
| GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
06/06/2017 | For Sale/ Stock | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
04/28/2017 | Repaired/shipped | |
| GetSpares | 54-0311 Prometrix UV1250/ 1050 optical array PDA |
UV1050 Tencor/KLA Inspection |
01/03/2017 | Repaired/shipped | |
| GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
06/06/2017 | Repaired/shipped | |
| GetSpares | 15451-010 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
05/30/2017 | Repaired/shipped | |
| GetSpares | CESP-001A F-VC-40833 DNS maintenance panel without SCN5 |
80B DNS Photolithograpy |
04/11/2017 | For Sale/ Stock | |
| GetSpares | 2-VC-16217-1EEBH-0021 DNS heater control bake unit |
80B DNS Photolithograpy |
05/24/2017 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
| GetSpares | 54-0317 36-0317 KLA PCB Measurement Control Board 54-0317 36-0317 |
UV1250-UV1280 Tencor/KLA Inspection |
03/29/2017 | Repaired/shipped | |
| GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
05/04/2017 | Repaired/shipped | |
| GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/15/2017 | Custom solution/shipped | |
| GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/15/2017 | Repaired/shipped | |
| GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
05/08/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
05/09/2017 | Repaired/shipped | |
| GetSpares | 36-0004 (Alternate 54-0005 or 54-0389) Prometrix Current Source PCB |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
| GetSpares | 36-0005 54-0006 Prometrix PCA ART Relay Board W/Exchange |
RS55 Prometrix/KLA Wafer Resistivity |
02/22/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
04/19/2017 | Repaired/shipped | |
| GetSpares | 710-693221-000 KLA Matrox Corona Rev 6 8M Confg AIT2, Slot |
8100 8100XP 8100XPR 8250 8300 8450 KLA SEM |
04/17/2017 | Repaired/shipped | |
| GetSpares | 356166 Matrox Corona KLA U500 Ultra/ES13497, Aerotech, 690D1470 Slot 18 |
AIT2 KLA Inspection |
04/17/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
04/24/2017 | Repaired/shipped | |
| GetSpares | CEMP-0016 EEMP-0021X3 DNS Main Display Panel |
80A DNS Photolithograpy |
04/18/2017 | Repaired/shipped | |
| GetSpares | 54-0014 36-0014 Prometrix PCA-DVM, ART Voltmeter PCB |
RS35 Prometrix/KLA Wafer Resistivity |
04/19/2017 | Custom solution/shipped | |
| GetSpares | 903-1598 Gasonics PCB-EOP/Pressure ControlIPC SPA |
L3510 Novellus/Gasonics RIE/Plasma |
04/03/2017 | Repaired/shipped | |
| GetSpares | 55079-763288 Prometrix PCA-DUAL Stepper Driver |
RS55 Prometrix/KLA Wafer Resistivity |
03/29/2017 | Repaired/shipped | |
| GetSpares | 36-0201 Prometrix H2 Interface PCB for UV1050/UV1250 |
UV1050 Tencor/KLA Inspection |
03/29/2017 | Custom solution/shipped | |
| GetSpares | 36-0287 Prometrix PCB Stage Driver F2 Rev. F |
UV1250-UV1280 Tencor/KLA Inspection |
03/29/2017 | Repaired/shipped | |
| GetSpares | 2-VC-19090 EERC-0012 DNS Transport Slave Board Repair |
80B DNS Photolithograpy |
04/03/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
03/13/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
04/04/2017 | Repaired/shipped | |
| GetSpares | L6599-01 Hamamatsu L6599-01 Lamp House for EEW |
SK200 DNS Photolithograpy |
04/02/2017 | Custom solution/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
03/10/2017 | Repaired/shipped | |
| GetSpares | INR-244-402 2-39-45751 DNS Thermo Controller INR |
80B DNS Photolithograpy |
03/13/2017 | Custom solution/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
| GetSpares | Undefined Undefined undefined |
Not Specified Not Specified Not Specified |
03/07/2017 | Repaired/shipped | |
| GetSpares | CERB-1016 2-VC-15254-1 DNS Transport Station Controller |
60A DNS Photolithograpy |
02/04/2017 | Repaired/shipped | |
| GetSpares | 2114B-30SLQST Cyonics CYONICS-UNIPHASE |
6220 KLA Inspection |
01/09/2017 | Repaired/shipped | |
| GetSpares | 2-39-51930 2-39-61074 UT3-F1AE DNS LCD |
SK200 DNS Photolithograpy |
02/24/2017 | Repaired/shipped | |
| GetSpares | CEDB-1013 2-VC-15252 DNS Indexer Board |
80A DNS Photolithograpy |
02/04/2017 | Repaired/shipped |
| GetSpares | INR-244-402-GSRPR aka 2-39-45751 Thermo Controller | DNS 80B | 03/13/2017 |
 Typical INR_244-402 |
||
| GetSpares | INR-244-402-GSRPR aka 2-39-45751 Thermo Controller | DNS 80B | 03/13/2017 |  |
||
| GetSpares | 600400-01 Track Interface PDB PD 80072E | SVG Track | 03/10/2017 | |
||
| GetSpares | 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 02/24/2017 |
 Typical SK200 LCD UT3-F1AE |
||
| GetSpares | 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 02/24/2017 |  |
||
| GetSpares | servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 02/24/2017 | |
||
| GetSpares | 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) | KLA/Prometrix RS-35 | 02/22/2017 |
 Prometrix_RS35/RS55_CurrentSource With Beckman 36-0004 (Alternate 54-0005 or 54-0389) |
||
| GetSpares | 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) | KLA/Prometrix RS-35 | 02/22/2017 | |
||
| GetSpares | 36-0004/54-0006 PCA ART Relay Board W/Exchange | KLA/Prometrix RS-35 | 02/22/2017 | |
||
| GetSpares | 36-0004/54-0006 PCA ART Relay Board W/Exchange | KLA/Prometrix RS-35 | 02/22/2017 | |
||
| GetSpares | A90-005-01-GSRPR A90-005-002 | Gasonics Aura1000 | 02/08/2017 | |
||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 02/06/2017 | |
|||
| GetSpares | CERB-1016 2-VC-15254-1 Transport Station Controller | DNS 80A | 02/04/2017 | |
||
| GetSpares | CERB-1016 2-VC-15254-1 Transport Station Controller | DNS 80A | 02/04/2017 | |
||
| GetSpares | CERB-1016 2-VC-15254-1 Transport Station Controller | DNS 80A | 02/04/2017 | |
||
| GetSpares | EEW Hamamatsu L6299-12 | DNS 80B / SK200 | 02/04/2017 | |
||
| GetSpares | servo amp 2-VC-27621 AU6354N40 and GESA-001 | DNS SK-200 | 02/04/2017 | |
||
| GetSpares | CEDB-1013 2-VC-15252 Indexer Board | DNS 80A | 02/04/2017 | |
||
| GetSpares | Argon 50 watt laser class III | KLA 6220 6420 | 02/01/2017 | |
||
| GetSpares | 16495-01-GSRPR Branson/IPC, I/O interface | Gasonics/Novellus L_3500 L_3510 | 01/13/2017 | |
||
| GetSpares | 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 01/09/2017 | |
||
| GetSpares | 0190-76050-GSRPR R Video PCB | Applied Materials P5000 / P5200 | 01/05/2017 | |
||
| GetSpares | DNS Lamphouse,Hamamatsu L6001-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 01/03/2017 | |
||
| GetSpares | 0100-02016-GSRPR Analog Sync Detect | Applied Materials | 12/16/2016 | |
||
| GetSpares | servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 12/15/2016 | |
||
| GetSpares | servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 12/12/2016 | |
||
| GetSpares | Tamagawa 3510N45E10 Motor AC servo | DNS | 11/21/2016 | |
||
| GetSpares | 95-0517 PCB Motherboard Intel 486DX CPU exchange program | Gasonics/Novellus L_3500 L_3510 | 11/18/2016 | |
||
| GetSpares | 0100-20066-GSRPR Analog Sync Detect | Applied Materials | 11/18/2016 | |
||
| GetSpares | Brooks ACE 001-4130-03 VCE Controller No MISC-IO | LAM and others | 11/02/2016 | |
||
| GetSpares | 95-0541 MISC mini-controller | Novellus / Gasonics PEP3510 | 10/27/2016 | |
||
| GetSpares | servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 10/13/2016 | |
||
| GetSpares | CT2939-000009-12-GSRPR Power Supply Upstair | TEL ACT 8 | 10/12/2016 | |
||
| GetSpares | Thermo-Con Power Supply INR-244-216 | TEL ACT 8 | 10/12/2016 | |
||
| GetSpares | DNS Lamphouse,Hamamatsu L6001-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 10/11/2016 | |
||
| GetSpares | FRD-4 2-39-45431-GSRPR | DNS 80B | 09/30/2016 | |
||
| GetSpares | FRD-4 2-39-45431-GSRPR | DNS 80B | 09/30/2016 | |
||
| GetSpares | servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 09/30/2016 | |
||
| GetSpares | Current Source PCB (Alternate 54-0005 or 54-0389) | KLA/Prometrix RS55/75 | 09/27/2016 | |
||
| GetSpares | 54-0014 36-0014 PCB DVM CARD | KLA/Prometrix RS55/RS75 | 09/27/2016 | |
||
| GetSpares | 36-0042 Analog I/O Board 54-0252 | KLA/Prometrix RS-55 | 09/27/2016 | |
||
| GetSpares | 16495-01E-GSRPR Branson/IPC, I/O interface | Gasonics/Novellus L_3500 L_3510 | 09/01/2016 | |
||
| GetSpares | servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 08/29/2016 | |
||
| GetSpares | Hamamatsu L6599-01 Lamp House for EEW | DNS Lamphouse-EEW 80B UV-SPOT light source | 08/19/2016 | |
||
| GetSpares | DNS Lamphouse,Hamamatsu L6001-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 08/19/2016 | |
||
| GetSpares | FRD-4 2-39-45431-GSRPR | DNS 80B | 08/15/2016 | |
||
| GetSpares | 3L135-GSRPR | DNS SK-200 | 08/15/2016 | |
||
| GetSpares | 95-3155 Cluster Misc Controller | Novellus / Gasonics PEP3510 | 08/04/2016 | |
||
| GetSpares | 95-0537 gas box mini controller 95-2977 | Novellus / Gasonics PEP3510 | 08/01/2016 | |
||
| GetSpares | 95-3155 Cluster Misc Controller | Novellus / Gasonics PEP3510 | 07/28/2016 | |
||
| GetSpares | 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 07/26/2016 | |
||
| GetSpares | CEDB-1013 2-VC-15252 Indexer Board | DNS 80A | 07/26/2016 | |
||
| GetSpares | 14-007009-GSRPR Auto FOCUS Driver Board | KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 | 07/08/2016 | |
||
| GetSpares | EEYC-0011 EEW station controller | DNS 80B | 07/08/2016 | |
||
| GetSpares | 16495-01-REV.7.4 Branson/IPC, I/O interface | Gasonics/Novellus L_3500 L_3510 | 07/06/2016 | |
||
| GetSpares | 14-010064-GSRPR Analog Processor Board Optiprobe 2600 W/Exchange | Thermawave | 07/06/2016 | |
||
| GetSpares | EEUE-001X3 | DNS EEW Control Unit | 07/05/2016 | |
||
| GetSpares | LCD Monitor 90X0054 | KLA | 06/22/2016 | |
||
| GetSpares | 373583-GSRPR ANALOG BOARD | AIT 2 KLA | 06/22/2016 | |
||
| GetSpares | INR-244-402-GSRPR aka 2-39-45751 Thermo Controller | DNS 80B | 06/22/2016 | |
||
| GetSpares | AG09 Lamp Power Unit | Hamamatsu L6299 | 06/15/2016 | |
||
| GetSpares | UFP-710-TA422 LCD Display | Canon i5 | 06/15/2016 | |
||
| GetSpares | Power supply from EEUE-001B unit | DNS 80B | 06/15/2016 | |
||
| GetSpares | AG09 Lamp Power Unit | Hamamatsu L6299 | 06/15/2016 | |
||
| GetSpares | 710-058894-00 FA Board | KLA Starlight SL3XX series | 06/14/2016 | |
||
| GetSpares | GetSpares | 710-058894-00 FA Board | KLA Starlight SL3XX series | 06/14/2016 | |
|
| 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 06/14/2016 | |
|||
| EEUD-0013 | DNS EEW Power Supply | 06/14/2016 | |
|||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 06/10/2016 | |
|||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 06/09/2016 | |
|||
| EESA-001 and AU3575N223 | DNS 80B | 06/09/2016 | |
|||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 06/09/2016 | |
|||
| EESA-001 and AU3575N223 | DNS 80B | 06/09/2016 | |
|||
| EEUE-001X3 | DNS EEW Control Unit | 06/08/2016 | |
|||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 06/08/2016 | |
|||
| EEUE-001B | DNS EEW Control Unit | 06/08/2016 | |
|||
| INR-244-402-GSRPR aka 2-39-45751 Thermo Controller | DNS 80B | 06/08/2016 | |
|||
| DNS Lamphouse,Hamamatsu L6001-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 06/07/2016 | |
|||
| DNS Lamphouse,Hamamatsu L6001-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 06/07/2016 | |
|||
| servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 06/01/2016 | |
|||
| FRD-4 2-39-45431-GSRPR | DNS 80B | 06/01/2016 | |
|||
| 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 05/23/2016 | |
|||
| FRD-4 2-39-45431-GSRPR | DNS 80B | 05/17/2016 | |
|||
| CEYD-0015 2-VC-13743-GSRPR | DNS 60A | 05/17/2016 | |
|||
| 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 05/15/2016 | |
|||
| D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 | DNS SK-200 | 05/10/2016 | |
|||
| CEDB-1013 2-VC-15252 Indexer Board | DNS 80A | 05/09/2016 | |
|||
| 2-39-51930 2-39-61074 LCD UT3-F1AE | DNS SK-200 | 05/06/2016 | |
|||
| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 05/05/2016 | |
|||
| 95-0517 PCB Motherboard Intel 486DX CPU exchange program | Gasonics/Novellus L_3500 L_3510 | 04/26/2016 | |
|||
| FRD-4 2-39-45431-GSRPR | DNS 80B | 04/26/2016 | |
|||
| Hamamatsu L6599-01 Lamp House for EEW | DNS 80B | 04/25/2016 | |
|||
| 95-0517 PCB Motherboard Intel 486DX CPU exchange program | Gasonics/Novellus L_3500 L_3510 | 04/21/2016 | |
|||
| 290432-REV A-GSRPR AOD Scanner | AIT 1 KLA | 04/19/2016 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 04/18/2016 | |
|||
| D2480-1 2-VC-28124 6-axis Motor Driver GEIA-001 | DNS SK-200 | 04/18/2016 | |
|||
| 2-39-51930 2-39-61074 LCD | DNS SK-200 | 04/14/2016 | |
|||
| 2-39-51930 2-39-61074 LCD | DNS SK-200 | 04/11/2016 | |
|||
| IPC51/596 UPIBOC-I INDUSTRIAL PC | DNS 80B | 04/08/2016 | |
|||
| UFP-710-TA422 LCD Display | Canon i5 | 04/08/2016 | |
|||
| CEDB-1013 2-VC-15252 Indexer Board | DNS 80A | 04/01/2016 | |
|||
| GEPH-001X3 Track Coater Power Supply | DNS SK-200 | 03/31/2016 | |
|||
| IPC51/596 UPIBOC-I INDUSTRIAL PC | DNS 80B | 03/21/2016 | |
|||
| IPC51/293 UPIBOC-I INDUSTRIAL PC | DNS 80B | 03/17/2016 | |
|||
| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 03/08/2016 | |
|||
| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 03/08/2016 | |
|||
| 884-98-000-GSRPR PCB -RMX PCB | MRC/Eclipse 4 CVD-PVD | 03/04/2016 | |
|||
| DNS Lamphouse,Hamamatsu L6599-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 02/29/2016 | |
|||
| DNS Lamphouse,Hamamatsu L6599-01GSRPR | DNS Lamphouse-EEW 80B UV-SPOT light source | 02/29/2016 | |
|||
| 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) | DNS 80B | 02/23/2016 | |
|||
| EESA-001 and AU3575N223 | DNS 80B | 02/18/2016 | |
|||
| EESA-001 and AU3575N223 | DNS 80B | 02/18/2016 | |
|||
| PCB, ASSY 375420 , 0235098 Beam Pos Control | KLA SP1-TB1 | 02/17/2016 | |
|||
| A90-005-01-GSRPR A90-005-002 | Gasonics Aura1000 | 02/12/2016 | |
|||
| CEDB-1013 2-VC-15252 Indexer Board | DNS 80A | 02/11/2016 | |
|||
| 0190-35765-GSRPR | Applied Materials AMAT Centura | 02/11/2016 | |
|||
| 0190-35765-GSRPR | Applied Materials AMAT Centura | 02/10/2016 | |
|||
| A90-005-01-GSRPR A90-005-002 | Gasonics Aura1000 | 02/10/2016 | |
|||
| 36-0042 Analog Power Supply 54-0057 | KLA/Prometrix RS-35 | 02/04/2016 | |
|||
| 54-0014 36-0014 PCA-DVM, ART Voltmeter | KLA/Prometrix RS-35 | 02/04/2016 | |
|||
| 36-0004 Current Source PCB (Alternate 54-0005 or 54-0389) | KLA/Prometrix RS-35 | 02/04/2016 | |
|||
| 54-0006 PCA ART Relay Board W/Exchange | KLA/Prometrix RS-35 | 02/04/2016 | |
|||
| FRD-4 2-39-45431-GSRPR | DNS 80B | 02/02/2016 | |
|||
| 493-30-1020-GSRPR HOTPLATE POWER SUPPLY MR-2015 | DNS 80B | 02/02/2016 | |
|||
| FRD-4 2-39-45431-GSRPR | DNS 80B | 02/02/2016 | |
|||
| 0090-75014-A-GSRPR Synergy CPU VME SBC (v21) | Applied Materials P5000 | 01/28/2016 | |
|||
| FRD-4 2-39-4543-1 | DNS 80B | 01/27/2016 | |
|||
| Driver Motor Box Servo PK CESA-804 | DNS 80A | 01/19/2016 | |
|||
| communication card 1-139-023 | IDI M300 | 01/07/2016 | |
|||
| 710-058895-00-GSRPR PCB Multi Speed Interface Board | KLA Starlight | 12/14/2015 | |
|||
| BG4-6582-000-GSRPR | Canon | 12/08/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR | DNS 80B | 12/08/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR | DNS 80B | 12/04/2015 | |
|||
| 0090-76110-GSRPR Synergy CPU VME SBC | Applied Materials V440 (V21) P5000 | 12/02/2015 | |
|||
| 0090-76110-A-GSRPR Synergy CPU VME SBC | Applied Materials V440 (SV21) P5000 | 11/24/2015 | |
|||
| LTS, TCB, VIDEO Generator | 11/19/2015 | |
||||
| 2-39-51930 2-39-61074 LCD | DNS SK-200 | 11/11/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 11/07/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 11/07/2015 | |
|||
| 90-2590 16495-01B Branson/IPC, I/O interface | Gasonics/Novellus L_3500 L_3510 | 11/06/2015 | |
|||
| 90-2590 16495-01B Branson/IPC, I/O interface | Gasonics/Novellus L_3500 L_3510 | 11/06/2015 | |
|||
| 2-39-51930 2-39-61074 LCD | DNS SK-200 | 11/04/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR | DNS 80B | 11/03/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR | DNS 80B | 11/03/2015 | |
|||
| 14-008473-GSRPR PCB, AUTO FOCUS | KLA Therma-Wave Opti-Probe 2600-2690 3260-3290 | 10/28/2015 | |
|||
| 410-01900 OBC Board (ECO-1000) 000-883100 050-883100 | Nicolet Magna ECO 1000 | 10/28/2015 | |
|||
| 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) | DNS 80B | 10/23/2015 | |
|||
| 2-39-51930-2-39-61074 | DNS SK-200 | 10/22/2015 | |
|||
| AG09 | Hamamatsu L6299 | 10/21/2015 | |
|||
| 52-0616 ME Box | KLA/Prometrix RS-75 | 10/21/2015 | |
|||
| 52-0616 ME Box | KLA/Prometrix RS-75 | 10/21/2015 | |
|||
| Leybold UL-500 | 10/19/2015 | |
||||
| 780-14091-000GSRPR | KLA8100 CD-SEM, 8100XP CD-SEM, 8100XPR CD-SEM, 8250 CD-SEM, 8300 CD-SEM, 8450 CD-SEM | 10/19/2015 | |
|||
| servo amp 2-39-48133-GSRPR AU3575N233 and EESA-001 | DNS 80B | 10/07/2015 | |
|||
| 52-0616 ME Box | KLA/Prometrix RS-75 | 09/21/2015 | |
|||
| servo amp AU3575N233 and EESA-001 | DNS 80B | 09/21/2015 | |
|||
| AC-2S06 Adaptor, Throttle Valve Controller (796-006238-002) | C1 Tylan General | 09/14/2015 | |
|||
| Timing Generator, PCB W/Exchange S6420 277266 | KLA/Tencor | 09/10/2015 | |
|||
| 2-VC-19090GSRPR Transport Slave Board Repair (EERC-0013) | DNS 80B | 09/08/2015 | |
|||
| 52-0616 ME Box | KLA/Prometrix RS-75 | 09/08/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/02/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/02/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/02/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/02/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 09/01/2015 | |
|||
| Laser sensor | KLA Laser | 08/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 08/20/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 08/20/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 08/20/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 08/20/2015 | |
|||
| EEBH-0011X1GSRPR heater control bake unit | DNS 80B | 08/18/2015 | |
|||
| 90-2590 | Gasonics/Novellus L_3500 L_3510 | 08/18/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 08/17/2015 | |
|||
| 02-00149-00 | Novellus / Gasonics C1 | 08/13/2015 | |
|||
| 95-0538 Cluster Misc Controller | Novellus / Gasonics PEP3510 | 08/12/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462-GSRPR | DNS 80B | 08/12/2015 | |
|||
| EEW Hamamatsu L6299-12 PSI-DUV248 | DNS 80B | 08/11/2015 | |
|||
| EEBH-0011X1GSRPR heater control bake unit | DNS 80B | 08/10/2015 | |
|||
| Driver Motor Box, Servo Pack CESA-804 | DNS 80A | 08/06/2015 | |
|||
| 50-188N PCB -RMX Control Board | MRC/Eclipse 4 CVD-PVD | 08/06/2015 | |
|||
| Driver Motor Box, Servo Pack CESA-804 | DNS 80A | 08/06/2015 | |
|||
| Driver Motor Box, Servo Pack CESA-804 | DNS 80A | 08/06/2015 | |
|||
| linear encoder | 08/04/2015 | |
||||
| -VC-34885-GSRPR EEBH-6011 heater control bake unit | DNS 80B | 08/03/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 2-39-53462 | DNS 80B | 07/30/2015 | |
|||
| 2-39-51930-2-39-61074 LCD | DNS SK-200 | 07/27/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 07/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 07/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 07/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 07/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 07/24/2015 | |
|||
| servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 07/23/2015 | |
|||
| servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 07/23/2015 | |
|||
| EEMP-0021X3 LCD DISPLAY | DNS 60B | |
||||
| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 07/14/2015 | |
|||
| 2-39-51930 2-39-61074 LCD | DNS SK-200 | 07/10/2015 | |
|||
| 2-39-51930-2-39-61074 LCD | DNS SK-200 | 07/10/2015 | |
|||
| 2-39-51930-2-39-61074 LCD | DNS SK-200 | 07/10/2015 | |
|||
| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 07/03/2015 | |
|||
| EEMP-0021X3 | DNS 60B | 07/02/2015 | |
|||
| SQV175-14XX | KLA/Prometrix RS35 | 06/30/2015 | |
|||
| Phasetronics PTR1000 120 KB 69039 Control Assembly | Novellus / Gasonics PEP3510 | 06/29/2015 | |
|||
| Computer FC-9821Ka | DNS 80A | 06/26/2015 | |
|||
| 903-1598 PCB-EOP/Pressure ControlIPC SPA | L_3510 Gasonics | 06/24/2015 | |
|||
| EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 | DNS 80B | 06/24/2015 | |
|||
| 50-188N PCB -RMX Control Board | MRC/Eclipse 4 CVD-PVD | 06/24/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/23/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/23/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/23/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/23/2015 | |
|||
| CEML-0014 DS-LAN BOARD/2-VC-1075-1 IF01068A | DNS 80B | 06/18/2015 | |
|||
| Computer FC-9821Ka | DNS 80A | 06/18/2015 | |
|||
| maintenance panel CESP-002 (Coat) | DNS 80B | 06/07/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/03/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/03/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/03/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 06/03/2015 | |
|||
| FRD-4 2-39-4543-1 | DNS 80B | 06/02/2015 | |
|||
| FRD-4 2-39-4543-1 | DNS 80B | 06/02/2015 | |
|||
| 0190-09379 ASSy VME CPU Synergy Upgrade | Applied Materials P5000 | 05/29/2015 | |
|||
| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 05/27/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 05/15/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 05/15/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 05/15/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 05/15/2015 | |
|||
| maintenance panel CESP-002 (Coat) | DNS 80B | 05/12/2015 | |
|||
| servo amp AU6356N20 / EESA-001/ EESA-001A1/2-39-53462 | DNS 80B | 05/12/2015 | |
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| maintenance panel CESP-002 (Coat) | DNS 80B | 05/12/2015 | |
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| 2-39-51930-2-39-61074 SN 001003BB LCD | DNS SK-200 | 05/10/2015 | |
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| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 05/05/2015 | |
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| JZ15-30549 LCD | DNS SK-200 | 04/28/2015 | |
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| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 04/28/2015 | |
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| 2-39-51930-2-39-61074 | DNS SK-200 | 04/28/2015 | |
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| 8axis Controller 2-VC-15485 EEKA-0011 8axis Controller ID-A Transport Unit 2-VC-23936, 2-VC-15485, MR-J10-S07 | DNS 80B | 04/28/2015 | |
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| Little Giant Bl1100 | 04/28/2015 | |
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| Unipower Vega 650 Lambda X65223B-ACFN | Unknown | 04/26/2015 | |
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| Unipower Vega 650 Lambda X65223B-ACFN | 04/24/2015 | |
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| LK27 | Canon I4 | 04/24/2015 | |
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| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 04/23/2015 | |
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| spin board EESC-0012 | DNS 80B | 04/22/2015 | |
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| spin board EESC-0012 | DNS 80B | 04/22/2015 | |
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| spin board EESC-0012 | DNS 80B | 04/22/2015 | |
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| spin board EESC-0012 | DNS 80B | 04/22/2015 | |
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| PMT | AIT 1 KLA 341444 | 04/06/2015 | |
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| PMT | AIT 1 KLA 341444 | 04/06/2015 | |
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| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 04/03/2015 | |
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| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 04/01/2015 | |
|||
| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 04/01/2015 | |
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| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 03/31/2015 | |
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| spin board EESC-0012 | DNS 80B | 03/27/2015 | |
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| Indexer EEDC-0011 | DNS 80B | 03/27/2015 | |
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| spin board EESC-0012 | DNS 80B | 03/27/2015 | |
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| spin board EESC-0012 | DNS 80B | 03/27/2015 | |
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| Indexer EEDC-0011 | DNS 80B | 03/27/2015 | |
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| CEBB-1011 Station Controller Board BAKE | DNS 60A | 03/26/2015 | |
|||
| 001-3252-133 | 03/24/2015 | |
||||
| 001-3252-133 | 03/24/2015 | |
||||
| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 03/20/2015 | |
|||
| 2114B-30SLQST CYONICS-UNIPHASE | KLA 6220 6420 | 03/20/2015 | |
|||
| 0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK | DBA-5CENTURA/ENDURA | 03/09/2015 | |
|||
| 95-3154 95-0547 microwave min | Novellus / Gasonics PEP3510 | 02/26/2015 | |
|||
| 90-2590 | L_3510 | 02/19/2015 | |
|||
| 90-2590 | L_3510 | 02/19/2015 | |
|||
| UDX5107N Vexta 5-Phase Driver Exchange | DNS 80B | 02/19/2015 | |
|||
| SQV175-14XX | KLA/Prometrix RS35 | 02/17/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 02/11/2015 | |
|||
| 0190-76043 Synergy CPU 68040 Controller | Applied Materials V440 | 02/11/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 02/11/2015 | |
|||
| Brooks ACE 001-4130-03 VCE Controller | LAM and others | 02/10/2015 | |
|||
| spin board EESC-0012 | 80b | 02/03/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 02/03/2015 | |
|||
| 95-0541 MISC mini-controller | Novellus / Gasonics PEP3510 | 01/29/2015 | |
|||
| 95-0537 gas box mini controller 95-2977 | Novellus / Gasonics PEP3510 | 01/29/2015 | |
|||
| 0090-75014 Synergy CPU | Applied Materials V440 (V21) | 01/29/2015 | |
|||
| 95-3154 95-0547 microwave min | Novellus / Gasonics PEP3510 | 01/29/2015 | |
|||
| maintenance panel CESP-0002 (Coater) | DNS 80B | 01/26/2015 | |
|||
| maintenance panel CESP-001A (Coater) | DNS 80B | 01/26/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 01/26/2015 | |
|||
| maintenance panel CESP-0018 (Develop) | DNS 80B | 01/26/2015 | |
|||
| SQV175-14XX | KLA/Prometrix RS35 | 01/22/2015 | |
|||
| SQV175-14XX | KLA/Prometrix RS35 | 01/22/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 01/22/2015 | |
|||
| 36-0042 Analog Power Supply | KLA/Prometrix RS-35 | 01/19/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 01/19/2015 | |
|||
| EESA-001A1 servo amp AU6356N20 and EESA-001 | DNS 80B | 01/19/2015 | |
|||
| 52-0616 ME Box | KLA/Prometrix RS-75 | 01/19/2015 | |
|||
| spin board EESC-0012 | DNS 80B | 01/10/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 01/06/2015 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 12/29/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 12/29/2014 | |
|||
| LCD power board ZD75-0524 | DNS 80B | 12/04/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 11/18/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 11/18/2014 | |
|||
| spin board EESC-0012 | 80b | 11/06/2014 | |
|||
| spin board EESC-0012 | 80b | 10/21/2014 | |
|||
| maintenance panel CESP-0017X2 (Coater) | DNS 80B | 10/15/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 10/15/2014 | |
|||
| spin board EESC-0012 | 80b | 10/10/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/27/2014 | |
|||
| AG09 Lamp Power Unit | Hamamatsu L6299 | 09/27/2014 | |
|||
| spin board EESC-0012 | 80b | 09/27/2014 | |
|||
| 54-0005 Current Source | KLA/Prometrix RS-35 | 09/23/2014 | |
|||
| 36-0004 Current Source | KLA/Prometrix RS-35 | 09/23/2014 | |
|||
| spin board EESC-0012 | 80b | 09/23/2014 | |
|||
| spin board EESC-0012 | 80b | 09/23/2014 | |
|||
| M400 | 09/18/2014 | |
||||
| 1-39-028 Pump Controller | IDI-400 | 09/08/2014 | |
|||
| maintenance panel CESP-0017X2 (Coater) | 80B | 09/01/2014 | |
|||
| mother board 1-130-020 | IDI M300 | 02/18/2014 | |
|||
| mother board 1-130-020 | IDI M300 | 02/18/2014 | |
|||
| mother board 1-130-020 | IDI M300 | 02/18/2014 | |
|||
| pump controller card 1-139-022 | IDI M300 | 02/18/2014 | |
|||
| com card 1-139-023 | IDI M300 | 02/18/2014 | |
PCB 903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP). This board is known to fail, causing deficient to zero throttle valve control during EOP. If you’re experiencing these or similar symptoms, contact GetSpares.com for replacement/repair solutions. GetSpares maintains fully operational L3510 tools, which means fully operational test environments for all relevant parts. Rest assured that the part you receive from GetSpares will be fully functional.
GaSonics L3510 EOP Pressure Controller 903-1598 PCB
The 0190-09379 VME V21 Synergy card is the CPU module for Applied Materials P5000 Reactive-ion Etching (RIE) and Chemical Vapor Deposition (CVD) Tool. These modules are reaching their life expectancy and beginning to fail.
If your P5000 is losing track of time, suffering erratic logging data, or experiencing any similar symptoms, contact GetSpares.com for replacement solutions. GetSpares maintains a functional P5000 on the warehouse floor with which all 0190-09379 VME V21 Synergy CPUs are tested – a guarantee that the replacement module will function in your P5000. Head to GetSpares.com today!
Top View: Applied Materials 0190-09379 VME V21 Synergy CPU
View of Applied Materials P5000 Electronic Module Cabinet with 0190-09379 VME V21 Synergy CPU card removed.
Side View of 0190-09379 VME V21 Synergy CPU card installed into Applied Materials P5000 Electronic Module Cabinet