Origin Return for Dainippon Screen DNS 80B Coat Develop Track


Take a look at these videos of robots, computers and other track pieces in action..

A way to communicate failure symptom for DNS track is to run the Origin Return / Lot Clear operation after a boot up. We collect videos of this process for different pieces during the origin return. Take a look and if you have any interesting DNS behavior that could help other technicians isolate track failures please email us at info@comvolt.com and we will post it for everybody to see.

Look at this spin cup during an origin return..Mostly just the nozzle arms move.


How about origin return of the transport robot?

Depending on where the origin return fails, it can point you which controller is failing. Typical error codes are:

1-03-0247, 1-03-0201, 1-03-0107, 1-01-0112, 1-02-0120, 1-03-1010, 1-03-0210, 1-03-0252, 1-03-0253, 1-01-0221 , 1-03-0242, 1-03-0254, 1-01-0310, 1-03-0258, 1-03-0255, 1-02-0470, 1-00-0023, 1-03-2001, 1-03-2101, 1-05-0015, 1-01-0210, 1-02-410, 01-02-0121, 1-03-0254, 1-03-0220, 1-01-0210, 1-06-0206, 1-00-0025, 1-03-0251

2-39-45431, 2-39-51930 2-39-61074 UT3-F1AE, 2-39-51930 2-39-61074 UT3-F1AE /DSS1-A, 2-39-51930 2-39-61074 UT3-X3AE / DSS4-A, 2-VC-15485 EEKA-0011 2-VC-23936 MR-J10-S07, 2-VC-16217-1EEBH-0021, 2-VC-19090 EERC-0012, 2-VC-19090 EERC-0013, 80A, 80B, 80B Scrubber AU6351N60 2-39-57597, CEDB-1013 2-VC-15252, CEMP-0016 EEMP-0021X3, CERB-1016 2-VC-15254-1, CESA-804, CESB-2011 2-VC-19075, CESB-2012, CESP-0002 2-VC-42102, CESP-0017, CESP-001A F-VC-40833, CESP-002, CEYD-0015 2-VC-13743, 2-VC-28124 GEIA-001, EEBH-0011, EEDC-0011 2-VC-19089, EEJA-001A, EESA-001 AU3575N223, EESA-001 AU3575N233 2-39-48133 , EESA-001A1 AU6356N20 EESA-001 2-39-53462, EESC-0012 2-VC-19115 Spin Slave, EEUC-0013, EEUD-0013, EEUE-001, EEUE-001B, EEUE-001X1, EEW, EEYC-0011 2-VC-20626, GEIC-002 BP-0015C, GEPH-001X3, GESA-001 AU6354N40 2-VC-27621Hamamatsu,IDI, IDI/Cybor, INR-244-216, INR-244-402 2-39-45751, INR-497-001B, INR-497-P2393 Motherboard, Motor, Motor Controller, OMRON, Photolithograpy, PiBoc, Power Supply, Robot Controller, Robots Servo Amp, Servo Driver, Slave Board, Slave Board , Stage Driver, Super Vexta UDX5107, ESP-002A2, Touchscreen VGA, Vexta,

Solutions for KLA , Gasonics, Hamamatsu, SMC, Cyonics, DNS, Novellus Prometrix Tencor Electronic Parts

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