{"id":88,"date":"2015-03-16T16:44:58","date_gmt":"2015-03-16T16:44:58","guid":{"rendered":"http:\/\/www.comvolt.com\/eblog\/?p=88"},"modified":"2015-03-21T17:21:20","modified_gmt":"2015-03-21T17:21:20","slug":"novellusgasonics-pep3510-process-mini-controllers-95-3798-95-3157-95-0541-95-0547-95-3154-95-0537-95-2977","status":"publish","type":"post","link":"http:\/\/www.comvolt.com\/eblog\/novellusgasonics-pep3510-process-mini-controllers-95-3798-95-3157-95-0541-95-0547-95-3154-95-0537-95-2977\/","title":{"rendered":"Novellus\/GaSonics PEP3510 Process Mini Controllers: 95-3798, 95-3157, 95-0541, 95-0547, 95-3154, 95-0537, 95-2977"},"content":{"rendered":"

The GaSonics PEP3510 ashing and etching system offers two parallel process chambers, each governed\u00a0by a set of three electronic modules referred to as\u00a0mini-controllers<\/em>. \u00a0The relevant part numbers for each mini-controller are listed below:\u00a0<\/em><\/p>\n

Miscellaneous: 95-3978, 95-3157, 95-0541
\nMicrowave: 95-0547, 95-3154
\nGas Box: 95-0537, 95-2977
\n<\/strong><\/p>\n

Failure of these mini-controllers is frequent and can result in an array of malfunctions including loss of communication, loss of door\/lamp\/wafer pin control, invalid status errors, and over-reading power output of the microwave.<\/p>\n

GetSpares.com<\/a> has these mini-controllers currently installed in a fully functional PEP3510. \u00a0They are ready to be pulled and shipped to you today. \u00a0Head to GetSpares.com<\/a>\u00a0for your parts needs!<\/p>\n

\"Process<\/a>

Process Mini Controllers – front<\/p><\/div>\n

\"Process<\/a>

Process Mini Controllers – rear<\/p><\/div>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

 <\/p>\n

\"Novellus<\/a>

Novellus GaSonics PEP3510<\/p><\/div>\n

\"Novellus<\/a>

Novellus GaSonics PEP3510<\/p><\/div>\n","protected":false},"excerpt":{"rendered":"

The GaSonics PEP3510 ashing and etching system offers two parallel process chambers, each governed\u00a0by a set of three electronic modules referred to as\u00a0mini-controllers. \u00a0The relevant part numbers for each mini-controller are listed below:\u00a0 Miscellaneous: 95-3978, 95-3157, 95-0541 Microwave: 95-0547, 95-3154 … Continue reading →<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":91,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"nf_dc_page":"","_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[111,110],"tags":[94,89,91,95,92,88,87,96,97,93,84,90,98,86,83,85,112,99,76],"class_list":["post-88","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-novellus-gasonics","category-plasma-ashing-and-etching","tag-95-0537","tag-95-0541","tag-95-0547","tag-95-2977","tag-95-3154","tag-95-3157","tag-95-3978","tag-ashing","tag-etching","tag-gas-box","tag-gasonics","tag-microwave","tag-mini-controller","tag-miscellaneous","tag-novellus","tag-pep-3510","tag-pep3510","tag-process","tag-wafer"],"jetpack_featured_media_url":"https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/03\/IMG_3277-e1426523806626.jpg?fit=2448%2C3264","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/88","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/comments?post=88"}],"version-history":[{"count":1,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/88\/revisions"}],"predecessor-version":[{"id":93,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/88\/revisions\/93"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/media\/91"}],"wp:attachment":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/media?parent=88"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/categories?post=88"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/tags?post=88"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}