{"id":279,"date":"2015-11-02T18:15:26","date_gmt":"2015-11-02T18:15:26","guid":{"rendered":"http:\/\/www.comvolt.com\/eblog\/?p=279"},"modified":"2015-11-02T18:15:26","modified_gmt":"2015-11-02T18:15:26","slug":"kla-tencor-8100-8250-8300-8450-series-critical-dimensions-scanning-electron-microscope-cd-sem-imaging-malfunctions-result-of-failed-column-control-chassis-ii-ccc2-part-number-720-06884-002","status":"publish","type":"post","link":"http:\/\/www.comvolt.com\/eblog\/kla-tencor-8100-8250-8300-8450-series-critical-dimensions-scanning-electron-microscope-cd-sem-imaging-malfunctions-result-of-failed-column-control-chassis-ii-ccc2-part-number-720-06884-002\/","title":{"rendered":"KLA-Tencor 8100, 8250, 8300, 8450 series Critical Dimensions – Scanning Electron Microscope (CD-SEM): imaging malfunctions result of failed Column Control Chassis II (CCC2) part number 720-06884-002"},"content":{"rendered":"

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002. \u00a0The observed failure mechanism is usually a ripple distortion effect along one or more view axes (see below images for clear examples).\u00a0GetSpares<\/a>\u00a0maintains fully operational KLA SEMs in their warehouse, as well as the ability to repair these critical electronics. \u00a0This means parts sent in for repair get fully tested in a functional tool before being sent out – so you can be assured of top quality service. \u00a0Contact GetSpares<\/a> today for replacement\/repair solutions!<\/p>\n

\"Front<\/a>

Front view of KLA 8100 SEM<\/p><\/div>\n

\"Side<\/a>

Side view of KLA 8100 SEM<\/p><\/div>\n

\"Rear<\/a>

Rear view of KLA8100 SEM. This is where CCC2 720-06884-002 is located.<\/p><\/div>\n

\"Close<\/a>

Close up view of CCC2 720-06884-002 installed in KLA 8100 SEM<\/p><\/div>\n

\"KLA<\/a>

KLA 8100 SEM imaging
Top – electron gun image of wafer site with funcitonal CCC2.
Bottom Left\/Right – same site shown when CCC2 malfunctions and causes ripple distortion in image.<\/p><\/div>\n

\"KLA<\/a>

KLA 8100 SEM imaging: malfunctioning CCP2 720-06884-002 causes ripple disortion<\/p><\/div>\n","protected":false},"excerpt":{"rendered":"

KLA-Tencor Critical Dimensions Scanning Electron Microscope (CD-SEM) models 8100, 8250, 8300, 8450 can suffer from imaging malfunctions as the result of a failed Column Control Chassis II (CCC2) unit – part number 720-06884-002. \u00a0The observed failure mechanism is usually a … Continue reading →<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"nf_dc_page":"","_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[125,279],"tags":[286,287,288,289,290,291,292,283,282,281,285,284,297,294,295,131,155,296,293,280,154],"class_list":["post-279","post","type-post","status-publish","format-standard","hentry","category-metrology","category-sems","tag-720-06884-002","tag-287","tag-8100xp","tag-8100xpr","tag-290","tag-291","tag-292","tag-ccc","tag-ccc2","tag-cd-sem","tag-column-control-chassis","tag-column-control-chassis-ii","tag-distortion","tag-electron-gun","tag-imaging","tag-kla","tag-kla-tencor","tag-ripple","tag-scanning-electron-microscope","tag-sem","tag-tencor"],"jetpack_featured_media_url":"","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/279","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/comments?post=279"}],"version-history":[{"count":1,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/279\/revisions"}],"predecessor-version":[{"id":280,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/279\/revisions\/280"}],"wp:attachment":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/media?parent=279"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/categories?post=279"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/tags?post=279"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}