{"id":209,"date":"2015-07-21T19:23:29","date_gmt":"2015-07-21T19:23:29","guid":{"rendered":"http:\/\/www.comvolt.com\/eblog\/?p=209"},"modified":"2015-07-21T19:29:15","modified_gmt":"2015-07-21T19:29:15","slug":"gasonics-l3510-eop-pressure-controller-903-1598","status":"publish","type":"post","link":"http:\/\/www.comvolt.com\/eblog\/gasonics-l3510-eop-pressure-controller-903-1598\/","title":{"rendered":"GaSonics L3510 EOP Pressure Controller 903-1598"},"content":{"rendered":"<p>PCB\u00a0903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP). \u00a0This board is known to fail, causing deficient to zero throttle valve control during EOP. \u00a0If you&#8217;re experiencing these or similar symptoms, contact <a href=\"http:\/\/www.GetSpares.com\" target=\"_blank\">GetSpares.com<\/a> for replacement\/repair solutions. \u00a0<a href=\"http:\/\/www.GetSpares.com\" target=\"_blank\">GetSpares<\/a> maintains fully operational L3510 tools, which means fully operational test environments for all relevant parts. \u00a0Rest assured that the part you receive from <a href=\"http:\/\/www.GetSpares.com\" target=\"_blank\">GetSpares<\/a> will be fully functional.<\/p>\n<div id=\"attachment_210\" style=\"width: 2170px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg\"><img data-recalc-dims=\"1\" decoding=\"async\" aria-describedby=\"caption-attachment-210\" loading=\"lazy\" class=\"size-full wp-image-210\" src=\"https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?resize=584%2C281\" alt=\"GaSonics L3510 EOP Pressure Controller 903-1598 PCB\" width=\"584\" height=\"281\" srcset=\"https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?w=2160 2160w, https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?resize=300%2C144 300w, https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?resize=1024%2C493 1024w, https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?resize=500%2C240 500w, https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?w=1168 1168w, https:\/\/i0.wp.com\/www.comvolt.com\/eblog\/wp-content\/uploads\/2015\/07\/EOP.jpg?w=1752 1752w\" sizes=\"auto, (max-width: 584px) 100vw, 584px\" \/><\/a><p id=\"caption-attachment-210\" class=\"wp-caption-text\">GaSonics L3510 EOP Pressure Controller 903-1598 PCB<\/p><\/div>\n","protected":false},"excerpt":{"rendered":"<p>PCB\u00a0903-1598 controlls the gas pressure valves for GaSonics L3510 chamber during the End Of Process (EOP). \u00a0This board is known to fail, causing deficient to zero throttle valve control during EOP. \u00a0If you&#8217;re experiencing these or similar symptoms, contact GetSpares.com &hellip; <a href=\"http:\/\/www.comvolt.com\/eblog\/gasonics-l3510-eop-pressure-controller-903-1598\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"nf_dc_page":"","_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[111,110],"tags":[226,224,84,113,227,225],"class_list":["post-209","post","type-post","status-publish","format-standard","hentry","category-novellus-gasonics","category-plasma-ashing-and-etching","tag-903-1598","tag-eop","tag-gasonics","tag-l3510","tag-pcb","tag-pressure-controller"],"jetpack_featured_media_url":"","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/209","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/comments?post=209"}],"version-history":[{"count":2,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/209\/revisions"}],"predecessor-version":[{"id":212,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/posts\/209\/revisions\/212"}],"wp:attachment":[{"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/media?parent=209"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/categories?post=209"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.comvolt.com\/eblog\/wp-json\/wp\/v2\/tags?post=209"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}